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Process integration of direct detection X-ray imaging arrays using a-Si:H technology
Author(s): Czang-Ho Lee
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Paper Abstract

Hydrogenated amorphous silicon (a-Si:H) has been widely used in low-temperature large area electronics such as solar cells, active-matrix liquid crystal displays (AMLCDs), and optical or X-ray image sensors for medical applications [1]. In particular, image sensors for diagnostic X-ray imaging are a very promising technology for creation of digital X-ray images, which can potentially replace conventional film imaging technique.

Paper Details

Date Published: 29 August 2017
PDF: 3 pages
Proc. SPIE 10313, Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, 1031340 (29 August 2017); doi: 10.1117/12.2283940
Show Author Affiliations
Czang-Ho Lee, Univ. of Waterloo (Canada)


Published in SPIE Proceedings Vol. 10313:
Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging
John C. Armitage, Editor(s)

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