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Proceedings Paper

Precision dual-positioning system
Author(s): Shigeru Sakuta; Katsunobu Ueda; Kiyoshi Ogawa; Yoshinaga Moriwaki; Mitsuo Sumiya
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Paper Abstract

As precision engineering has been improved in recent years, precision positioning systems withnanoineter accuracy are also required. Experimental precision dual positioning apparatus, consisting of friction drive and piezoelectric actuator", was made in Toshiba laboratory. In this apparatus, the piezoelectric actuator, designed for fine positioning, is mounted on top of the friction drive slide , designed for coarse positioning . Individual loops were closed by laser interferometer systems with 2.5nm resolution. The friction drive and piezoelectric actuator moved together , using a kind of inchworm movement method. The method made it possible for this positioning system to have an over 100mm stroke with 2.5nzn resolution and no backlash.

Paper Details

Date Published: 1 November 1990
PDF: 8 pages
Proc. SPIE 1334, Current Developments in Optical Engineering IV, (1 November 1990); doi: 10.1117/12.22831
Show Author Affiliations
Shigeru Sakuta, Toshiba Corp. (Japan)
Katsunobu Ueda, Toshiba Corp. (Japan)
Kiyoshi Ogawa, Toshiba Corp. (Japan)
Yoshinaga Moriwaki, Toshiba Corp. (Japan)
Mitsuo Sumiya, Toshiba Corp. (Japan)


Published in SPIE Proceedings Vol. 1334:
Current Developments in Optical Engineering IV
Robert E. Fischer; Warren J. Smith, Editor(s)

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