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Proceedings Paper

ZnO semiconductor for applications in optoelectronics sensors structures
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Paper Abstract

The paper presents numerical analysis of integrated optics structure in the form of planar waveguide based on polymer material (SU-8) with additional cover layer based on wide band gap oxide semiconductor – zinc oxide (ZnO). The theoretical studies of integrated optics structure presented in the paper was focused on determination of waveguide properties such as: modal field distribution and effective refractive index Neff as a function of optical and geometrical properties of waveguide and cover layer. The theoretical studies presented in the paper was carried out for two type of planar waveguide structure: without additional cover layer and with additional cover layer based on ZnO. The second part of the paper presents experimental results focused on technology of a single mode planar waveguide based on SU-8 polymer.

Paper Details

Date Published: 1 September 2017
PDF: 5 pages
Proc. SPIE 10455, 12th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods, 104550K (1 September 2017); doi: 10.1117/12.2282663
Show Author Affiliations
Przemyslaw Struk, Silesian Univ. of Technology (Poland)
Tadeusz Pustelny, Silesian Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 10455:
12th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods
Przemyslaw Struk; Tadeusz Pustelny, Editor(s)

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