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Proceedings Paper

Efficient self-seeding in a long cavity-length discharge-excited excimer laser system
Author(s): Yuanyuan Fan; Huirong Cui; Hui Li; Lijia Zhang; Xingliang Song; Yi Zhou
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Paper Abstract

A self-seeded discharge-excited ArF excimer laser oscillator using a dual-cavity configuration with long cavity lengths was developed and characterized. Proper designs for effective mode-locking in long cavity-lengths are proposed and demonstrated experimentally, which will significantly improve the energy and monochromaticity. By using the techniques of efficient mode-locking, self-seeded laser outputs with nearly the same linewidths with the seeders and larger energies are obtained. And the mode-locking can be achieved at different laser linewidths and wavelength centers.

Paper Details

Date Published: 24 October 2017
PDF: 6 pages
Proc. SPIE 10457, AOPC 2017: Laser Components, Systems, and Applications, 104570G (24 October 2017); doi: 10.1117/12.2282398
Show Author Affiliations
Yuanyuan Fan, Academy of Opto-Electronics (China)
Beijing Excimer Laser Technology and Engineering Ctr. (China)
Huirong Cui, Academy of Opto-Electronics (China)
Beijing Excimer Laser Technology and Engineering Ctr. (China)
Hui Li, Academy of Opto-Electronics (China)
Beijing Excimer Laser Technology and Engineering Ctr. (China)
Lijia Zhang, Academy of Opto-Electronics (China)
Beijing Excimer Laser Technology and Engineering Ctr. (China)
Xingliang Song, Academy of Opto-Electronics (China)
Beijing Excimer Laser Technology and Engineering Ctr. (China)
Yi Zhou, Academy of Opto-Electronics (China)
Beijing Excimer Laser Technology and Engineering Ctr. (China)


Published in SPIE Proceedings Vol. 10457:
AOPC 2017: Laser Components, Systems, and Applications
Shibin Jiang; Lijun Wang; Lan Jiang; Long Zhang, Editor(s)

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