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Proceedings Paper

Testing the limits of the Stoney Equation for assessing stress in thin films from interferometric wavefront deformation measurements
Author(s): E. Jankowska; Yang Le; C. S. Menoni
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Paper Abstract

We describe an optical measurement technique based on Carrier Frequency Interferometry (CFI) that allows to measure wavefront deformation of coated optics with high accuracy. The sensitivity of the method is considerably greater than phase shifting interferometry. The limits of validity of the Stoney equation in calculating stress in thin films is assessed using CFI. The evolution of stress in Ta2O5 films deposited by ion beam sputtering is also evaluated.

Paper Details

Date Published: 13 November 2017
PDF: 8 pages
Proc. SPIE 10447, Laser-Induced Damage in Optical Materials 2017, 104472E (13 November 2017); doi: 10.1117/12.2282278
Show Author Affiliations
E. Jankowska, Colorado State Univ. (United States)
Yang Le, Colorado State Univ. (United States)
C. S. Menoni, Colorado State Univ. (United States)

Published in SPIE Proceedings Vol. 10447:
Laser-Induced Damage in Optical Materials 2017
Gregory J. Exarhos; Vitaly E. Gruzdev; Joseph A. Menapace; Detlev Ristau; MJ Soileau, Editor(s)

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