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Proceedings Paper

Simplified rule generation for automated rules-based optical enhancement
Author(s): Oberdan W. Otto; Joseph G. Garofalo; Richard C. Henderson
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Paper Abstract

This paper demonstrates a new methodology called parametric anchoring in which a small number of representative line-space measurements are used to match a given lithographic process to computational models for a rule-based optical enhancement scheme. The rule generation program, SimRuleTM, which incorporates the models, is used to create the rule lookup tables which are in turn used by the rules-based correction program, OPRXTM. Parametric anchoring is performed before the rule tables are computed, as distinguished from the earlier anchoring approach in which the multi-dimensional rule tables are reshaped to match a number of measured points. Parametric anchoring uses line and space measurements which are familiar to process engineers.

Paper Details

Date Published: 8 December 1995
PDF: 11 pages
Proc. SPIE 2621, 15th Annual BACUS Symposium on Photomask Technology and Management, (8 December 1995); doi: 10.1117/12.228212
Show Author Affiliations
Oberdan W. Otto, Trans Vector Technologies, Inc. (United States)
Joseph G. Garofalo, AT&T Bell Labs. (United States)
Richard C. Henderson, Trans Vector Technologies, Inc. (United States)

Published in SPIE Proceedings Vol. 2621:
15th Annual BACUS Symposium on Photomask Technology and Management
Gilbert V. Shelden; James N. Wiley, Editor(s)

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