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Proceedings Paper

Fast sparse aerial-image calculation for OPC
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Paper Abstract

Fast sparse aerial image simulation and its use in optical proximity correction (OPC) is the topic of this paper. The primary result is a new lookup table formulation of aerial image calculation for a partially coherent optical system. As a generalization of our previous work for Manhattan geometry, the new technique extends the fast lookup technique to arbitrary polygonal mask geometry. Using the new method, the computation required for a sample point of the image intensity is proportional to the number of polygon edges in the local mask region. Moreover, the method is particularly well suited for perturbations to the mask such as those OPC might produce. Our implementation of the new technique achieves intensity calculation speeds of 6 msec/point and perturbational update speeds of 26 microsecond(s) ec/point on a Sun SPARC 10.

Paper Details

Date Published: 8 December 1995
PDF: 12 pages
Proc. SPIE 2621, 15th Annual BACUS Symposium on Photomask Technology and Management, (8 December 1995); doi: 10.1117/12.228208
Show Author Affiliations
Nicolas B. Cobb, Univ. of California/Berkeley (United States)
Avideh Zakhor, Univ. of California/Berkeley (United States)


Published in SPIE Proceedings Vol. 2621:
15th Annual BACUS Symposium on Photomask Technology and Management
Gilbert V. Shelden; James N. Wiley, Editor(s)

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