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Proceedings Paper

Methods for improving the damage performance of fused silica polished by magnetorheological finishing
Author(s): K. R. P. Kafka; B. Hoffman; S. Papernov; M. A. DeMarco; C. Hall; K. L. Marshall; S. G. Demos
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Paper Abstract

The laser-induced damage threshold of fused-silica samples processed via magnetorheological finishing is investigated for polishing compounds depending on the type of abrasive material and the post-polishing surface roughness. The effectiveness of laser conditioning is examined using a ramped pre-exposure with the same 351-nm, 3-ns Gaussian pulses. Finally, we examine chemical etching of the surface and correlate the resulting damage threshold to the etching protocol. A combination of etching and laser conditioning is found to improve the damage threshold by a factor of ~3, while maintaining <1-nm surface roughness.

Paper Details

Date Published: 11 December 2017
PDF: 5 pages
Proc. SPIE 10447, Laser-Induced Damage in Optical Materials 2017, 1044709 (11 December 2017); doi: 10.1117/12.2281479
Show Author Affiliations
K. R. P. Kafka, Univ. of Rochester (United States)
B. Hoffman, Univ. of Rochester (United States)
S. Papernov, Univ. of Rochester (United States)
M. A. DeMarco, QED Technologies, Inc. (United States)
C. Hall, QED Technologies, Inc. (United States)
K. L. Marshall, Univ. of Rochester (United States)
S. G. Demos, Univ. of Rochester (United States)


Published in SPIE Proceedings Vol. 10447:
Laser-Induced Damage in Optical Materials 2017
Gregory J. Exarhos; Vitaly E. Gruzdev; Joseph A. Menapace; Detlev Ristau; MJ Soileau, Editor(s)

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