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Proceedings Paper

Next-generation all-silica coatings for UV applications
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Paper Abstract

Band-gap and refractive index are known as fundamental properties determining intrinsic optical resistance of multilayer dielectric coatings. By considering this fact we propose novel approach to manufacturing of interference thin films, based on artificial nano-structures of modulated porosity embedded in high band-gap matrix. Next generation all-silica mirrors were prepared by GLancing Angle Deposition (GLAD) using electron beam evaporation. High reflectivity (HR) was achieved by tailoring the porosity of highly resistant silica material during the thin film deposition process. Furthermore, the proposed approach was also demonstrated to work well in case of anti-reflection (AR) coatings. Conventional HR HfO2 and SiO2 as well as AR Al2O3 and SiO2 multilayers produced by Ion Beam Sputtering (IBS) were used as reference coatings. Damage performance of experimental coatings was also analyzed. All-silica based GLAD approach resulted in significant improvement of intrinsic laser damage resistance properties if compared to conventional coatings. Besides laser damage testing, other characteristics of experimental coatings are analyzed and discussed – reflectance, surface roughness and optical scattering. We believe that reported concept can be expanded to virtually any design of thin film coatings thus opening a new way of next generation highly resistant thin films well suited for high power and UV laser applications.

Paper Details

Date Published: 13 November 2017
PDF: 9 pages
Proc. SPIE 10447, Laser-Induced Damage in Optical Materials 2017, 104470U (13 November 2017); doi: 10.1117/12.2280517
Show Author Affiliations
A. Melninkaitis, Vilnius Univ. (Lithuania)
L. Grinevičiūtė, Ctr. for Physical Sciences and Technology (Lithuania)
G. Abromavičius, Ctr. for Physical Sciences and Technology (Lithuania)
L. Mažulė, Vilnius Univ. (Lithuania)
L. Smalakys, Vilnius Univ. (Lithuania)
E. Pupka, Lidaris UAB (Lithuania)
M. Ščiuka, Lidaris UAB (Lithuania)
R. Buzelis, Ctr. for Physical Sciences and Technology (Lithuania)
S. Kičas, Ctr. for Physical Sciences and Technology (Lithuania)
T. Tolenis, Ctr. for Physical Sciences and Technology (Lithuania)


Published in SPIE Proceedings Vol. 10447:
Laser-Induced Damage in Optical Materials 2017
Gregory J. Exarhos; Vitaly E. Gruzdev; Joseph A. Menapace; Detlev Ristau; MJ Soileau, Editor(s)

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