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HfO2-SiO2 mixed film deposited by Ion Assisted Deposition Coevaporation
Author(s): Xinshang Niu; Hongfei Jiao; Ganghua Bao; Jinlong Zhang; Xinbin Cheng; Zhanshan Wang
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Paper Abstract

Low absorption, low scattering and high-density HfO2 coatings lead to an important improvement of high power laser systems. In order to suppress the crystallization of HfO2 coatings fabricated with ion assisted deposition (IAD), we used double electron-beam (EB) coevaporation with ion beam assisting method to fabricate HfO2-SiO2 mixtures from two independent material sources. Crystallization following the different mixture ratios was investigated. Several prototypes were designed, featuring different HfO2-SiO2 ratios with similar physical thickness (500nm). The samples were deposited on fused silica and silicon substrates. X-ray diffraction patterns show that the degree of crystallization gradually fades away with increasing SiO2 contents and when SiO2 component reach 18%, the mixture film becomes almost amorphous. To decrease the high absorption originating from IAD method, thermal annealing in air at progressive temperatures was subsequently performed. It was found that post-annealing treatment at 600°C could eliminate the absorption at 1064nm. However, high temperature annealing would induce the crystallization of these initial amorphous coatings. In order to suppress the crystallization further to obtain amorphous structure even after 600°C annealing, the 25% SiO2 sample was fabricated and it successfully obtain low roughness and low absorption equivalent to the bare substrate. Finally, a 1064 nm HR coating using SiO2 and mixed film of 25% SiO2 concentration was prepared and annealed to prove its practical application in low loss and high LIDT optical elements.

Paper Details

Date Published: 23 November 2017
PDF: 9 pages
Proc. SPIE 10447, Laser-Induced Damage in Optical Materials 2017, 1044726 (23 November 2017); doi: 10.1117/12.2280438
Show Author Affiliations
Xinshang Niu, Tongji Univ. (China)
Hongfei Jiao, Tongji Univ. (China)
Ganghua Bao, Tongji Univ. (China)
Jinlong Zhang, Tongji Univ. (China)
Xinbin Cheng, Tongji Univ. (China)
Zhanshan Wang, Tongji Univ. (China)

Published in SPIE Proceedings Vol. 10447:
Laser-Induced Damage in Optical Materials 2017
Gregory J. Exarhos; Vitaly E. Gruzdev; Joseph A. Menapace; Detlev Ristau; MJ Soileau, Editor(s)

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