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Proceedings Paper

Film stress and surface shape control of dichroic beam-spliter (DBS) with polarization maintaining by stress compensation method
Author(s): Chong Ma; Gang Chen; Dingquan Liu; Daqi Li
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Paper Details

Date Published:
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Proc. SPIE 10448, Optifab 2017, ; doi: 10.1117/12.2279960
Show Author Affiliations
Chong Ma, Shanghai Institute of Technical Physics of the Chinese Academy of Sciences (China)
Gang Chen, Shanghai Institute of Technical Physics of the Chinese Academy of Sciences (China)
Dingquan Liu, Shanghai Institute of Technical Physics of the Chinese Academy of Sciences (China)
Daqi Li, Shanghai Institute of Technical Physics of the Chinese Academy of Sciences (China)


Published in SPIE Proceedings Vol. 10448:
Optifab 2017
Julie L. Bentley; Sebastian Stoebenau, Editor(s)

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