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Proceedings Paper

An optimized method to calculate error correction capability of tool influence function in frequency domain
Author(s): Jia Wang; Xi Hou; Yongjian Wan; Chunyan Shi
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Paper Abstract

An optimized method to calculate error correction capability of tool influence function (TIF) in certain polishing conditions will be proposed based on smoothing spectral function. The basic mathematical model for this method will be established in theory. A set of polishing experimental data with rigid conformal tool is used to validate the optimized method. The calculated results can quantitatively indicate error correction capability of TIF for different spatial frequency errors in certain polishing conditions. The comparative analysis with previous method shows that the optimized method is simpler in form and can get the same accuracy results with less calculating time in contrast to previous method.

Paper Details

Date Published: 16 October 2017
PDF: 7 pages
Proc. SPIE 10448, Optifab 2017, 104481Z (16 October 2017); doi: 10.1117/12.2279655
Show Author Affiliations
Jia Wang, Institute of Optics and Electronics (China)
Xi Hou, Institute of Optics and Electronics (China)
Yongjian Wan, Institute of Optics and Electronics (China)
Chunyan Shi, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 10448:
Optifab 2017
Julie L. Bentley; Sebastian Stoebenau, Editor(s)

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