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Proceedings Paper

Fabrication and test of the grazing-incidence supersmooth precision cylindrical mirror
Author(s): Changxin Zhou; Jing-Hong Shao
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Paper Abstract

A large supersmooth precision cylindrical scanning mirror has been designed and in- stalled in beam-line BL-5 at Beijing Electron Positron Collider (BEPC) for synchro- tron radiation soft x-ray photolithography experimental station. Soft x-ray at wave length 4-20A collimated passing through cylindrical mirror is sent into experimental station at distance of 33 m from the source. Horizotal acceptance angle and grazing incidence angle are 7.5 mrad and 1.5 degree, respectively. The cylindrical mirror is made of aluminium alloy LD2 and its dimension and radius are 24OX110X30 mm and 527.5 mm, respectively. High accuracy figuring and supersmooth surface of the mirror are required in order to reduce energy lo$s as less as posible. Thj paper describts the fabrication technique and test method of the cylindrical mirror. The blank made of aluminium alloy is machined and formed precisely and then the surface of cylindrical mirror is plated by means of electronless nickel plating, and grinded precisely and polished superprecisely special fine grinding abrasive on cylindrical mirror fabreationmechinemodified. Finally Au coat is coated on the slit'- face of cylinbrocal mirror by coating machine under UHV condition 1O0 torr • The fi guring error of surface of the mirror is tested by test glass and interferometor; surface roughness of the mirror is tested by means of the scattering method and in terferometry. The s1op error, figuring error and roughnes of the surface of the cy lindeical mirror are less than 10 arc second, /1O and 1OA RMS, respectively. Per formence as mentioned above meets requirements of design.

Paper Details

Date Published: 1 November 1990
PDF: 9 pages
Proc. SPIE 1333, Advanced Optical Manufacturing and Testing, (1 November 1990); doi: 10.1117/12.22796
Show Author Affiliations
Changxin Zhou, Changchun Institute of Optics and Fine Mechanics (China)
Jing-Hong Shao, Changchun Institute of Optics (China)

Published in SPIE Proceedings Vol. 1333:
Advanced Optical Manufacturing and Testing
Gregory M. Sanger; Paul B. Reid; Lionel R. Baker, Editor(s)

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