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Proceedings Paper

Zero-contrast silicon-based metasurfaces: resonance physics and applications
Author(s): Yeong Hwan Ko; Robert Magnusson
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Paper Abstract

We review properties of 1D and 2D resonant silicon metasurfaces based on fundamental electromagnetic resonance effects in thin periodic films. The spectral response upon transition from zero-contrast to high-contrast grating interfaces is explored. We discuss design and optimization with rigorous mathematical methods and review typical fabrication processes. New theoretical and experimental results for numerous devices are furnished. These include wideband reflectors and flat-top bandpass filters with multi-module resonant structures. The guided-mode resonance concept applies in all spectral regions, from the visible band to the microwave domain, with available low-loss materials.

Paper Details

Date Published: 30 August 2017
PDF: 10 pages
Proc. SPIE 10356, Nanostructured Thin Films X, 103560N (30 August 2017); doi: 10.1117/12.2275894
Show Author Affiliations
Yeong Hwan Ko, The Univ. of Texas at Arlington (United States)
Robert Magnusson, The Univ. of Texas at Arlington (United States)


Published in SPIE Proceedings Vol. 10356:
Nanostructured Thin Films X
Yi-Jun Jen; Akhlesh Lakhtakia; Tom G. Mackay, Editor(s)

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