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Proceedings Paper

Measurement of low-order aberrations with an autostigmatic microscope
Author(s): William P. Kuhn
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Paper Abstract

The addition of a piezo-electric focusing stage and phase retrieval algorithms to a compact, adaptable autostigmatic microscope provides for both improved focus sensitivity during optical system alignment as well as the ability to measure low-order aberrations for system qualification. A description of the instrument and initial results are reported.

Paper Details

Date Published: 22 August 2017
PDF: 8 pages
Proc. SPIE 10377, Optical System Alignment, Tolerancing, and Verification XI, 103770C (22 August 2017); doi: 10.1117/12.2274813
Show Author Affiliations
William P. Kuhn, Opt-E (United States)


Published in SPIE Proceedings Vol. 10377:
Optical System Alignment, Tolerancing, and Verification XI
José Sasián; Richard N. Youngworth, Editor(s)

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