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Proceedings Paper

Study of thin film oxidation kinetics using a combination of simulations and advanced characterization (Conference Presentation)
Author(s): Juan Jose Díaz León; David M. Fryaud; Nobuhiko P. Kobayashi
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Paper Abstract

Understanding thin film oxidation is fundamental from a scientific point of view. There are many processes that benefit from oxidation, such as passivation or memristor formation. On the other hand, oxidation can be a burden, such as in metallic interconnects. Oxidation thermodynamics have been studied for a long time; however, oxidation kinetics in different time scales, oxidation environments and temperatures have yet to be fully understood. In this work we use a combination of simulations and nanoscale characterization to further investigate and understand oxidation kinetics. Results include self-aligned electroforming of selector/memristor structures and ways to control copper oxide formation.

Paper Details

Date Published: 21 September 2017
Proc. SPIE 10349, Low-Dimensional Materials and Devices 2017, 1034910 (21 September 2017); doi: 10.1117/12.2274809
Show Author Affiliations
Juan Jose Díaz León, Univ. of California, Santa Cruz (United States)
David M. Fryaud, Univ. of California, Santa Cruz (United States)
Nobuhiko P. Kobayashi, Univ. of California, Santa Cruz (United States)

Published in SPIE Proceedings Vol. 10349:
Low-Dimensional Materials and Devices 2017
Nobuhiko P. Kobayashi; A. Alec Talin; M. Saif Islam; Albert V. Davydov, Editor(s)

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