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Proceedings Paper • Open Access • new

Speckle-based portable device for in-situ metrology of x-ray mirrors at Diamond Light Source
Author(s): Hongchang Wang; Yogesh Kashyap; Tunhe Zhou; Kawal Sawhney

Paper Abstract

For modern synchrotron light sources, the push toward diffraction-limited and coherence-preserved beams demands accurate metrology on X-ray optics. Moreover, it is important to perform in-situ characterization and optimization of X-ray mirrors since their ultimate performance is critically dependent on the working conditions. Therefore, it is highly desirable to develop a portable metrology device, which can be easily implemented on a range of beamlines for in-situ metrology. An X-ray speckle-based portable device for in-situ metrology of synchrotron X-ray mirrors has been developed at Diamond Light Source. Ultra-high angular sensitivity is achieved by scanning the speckle generator in the X-ray beam. In addition to the compact setup and ease of implementation, a user-friendly graphical user interface has been developed to ensure that characterization and alignment of X-ray mirrors is simple and fast. The functionality and feasibility of this device is presented with representative examples.

Paper Details

Date Published: 7 September 2017
PDF: 6 pages
Proc. SPIE 10385, Advances in Metrology for X-Ray and EUV Optics VII, 1038504 (7 September 2017); doi: 10.1117/12.2274780
Show Author Affiliations
Hongchang Wang, Diamond Light Source Ltd. (United Kingdom)
Yogesh Kashyap, Diamond Light Source Ltd. (United Kingdom)
Tunhe Zhou, Diamond Light Source Ltd. (United Kingdom)
Kawal Sawhney, Diamond Light Source Ltd. (United Kingdom)


Published in SPIE Proceedings Vol. 10385:
Advances in Metrology for X-Ray and EUV Optics VII
Lahsen Assoufid; Haruhiko Ohashi; Anand Krishna Asundi, Editor(s)

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