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Proceedings Paper

Trajectory error analysis of a flexure pivot type guide for linear nanopositioning
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Paper Abstract

With the current drive towards diffraction limited storage rings, hard x-ray optics will require subsequent increases in positioning accuracy over large travel ranges. Nanometer-level precision positioning requires the use of compliant mechanisms to remove friction and backlash type errors. Ideally, the compliant mechanism is compliant in the direction of desired travel and rigid in all other directions. However, in reality, there is still compliance in these other directions, particularly for flexure pivots, which lead to parasitic trajectory errors. In this paper we analyze the trajectory errors of a linear guiding mechanism, composed of commercially available C-Flex Bearing Co. Inc. and Riverhawk Co. flexure pivots, using finite element analysis and experimental measurements. The guide is designed as an assembly of double parallel 4-bar type deformation compensated linear guiding mechanisms, and incorporates a novel 1:2 stabilizer unit to control the middle-bar. The focus of the analysis is on the trajectory errors caused by rotation center shift, manufacturing tolerances, flexure pivot size, assembly tolerances, and includes a discussion of methods to mitigate these errors.

Paper Details

Date Published: 23 August 2017
PDF: 8 pages
Proc. SPIE 10371, Optomechanical Engineering 2017, 103710D (23 August 2017); doi: 10.1117/12.2274194
Show Author Affiliations
Steven Kearney, Argonne National Lab. (United States)
Deming Shu, Argonne National Lab. (United States)


Published in SPIE Proceedings Vol. 10371:
Optomechanical Engineering 2017
Alson E. Hatheway; David M. Stubbs, Editor(s)

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