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Proceedings Paper

Design and test of precision vertical and horizontal linear nanopositioning flexure stages with centimeter-level travel range for x-ray instrumentation
Author(s): Deming Shu; Barry Lai; Steven Kearney; Jayson Anton; Wenjun Liu; Jorg Maser; Christian Roehrig; Jonathan Z. Tischler
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Paper Abstract

The ever-increasing spatial resolution of nanofocusing hard x-ray optics, coupled with the need for long working distances and spectroscopic imaging, requires stages that translate optics and samples over millimeters with trajectory errors of under 10 nm. To overcome the performance limitations of precision ball-bearing-based or roller-bearing-based linear stage systems, compact vertical and horizontal linear nanopositioning flexure stages, with centimeter-level travel range, have been designed and tested at the Advanced Photon Source (APS) for x-ray instrumentation applications. The mechanical design and finite element analyses of the flexural stages, as well as its preliminary test results with laser interferometers are described in this paper.

Paper Details

Date Published: 23 August 2017
PDF: 9 pages
Proc. SPIE 10371, Optomechanical Engineering 2017, 103710C (23 August 2017); doi: 10.1117/12.2274168
Show Author Affiliations
Deming Shu, Argonne National Lab. (United States)
Barry Lai, Argonne National Lab. (United States)
Steven Kearney, Argonne National Lab. (United States)
Jayson Anton, Argonne National Lab. (United States)
Univ. of Illinois at Chicago (United States)
Wenjun Liu, Argonne National Lab. (United States)
Jorg Maser, Argonne National Lab. (United States)
Christian Roehrig, Argonne National Lab. (United States)
Jonathan Z. Tischler, Argonne National Lab. (United States)


Published in SPIE Proceedings Vol. 10371:
Optomechanical Engineering 2017
Alson E. Hatheway; David M. Stubbs, Editor(s)

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