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Proceedings Paper

Improvement of accuracy in inner profile measurement of pipes and holes using an optical probe
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Paper Details

Date Published:
Proc. SPIE 10373, Applied Optical Metrology II, 1037303; doi: 10.1117/12.2273601
Show Author Affiliations
Toru Yoshizawa, Tokyo Univ. of Agriculture and Technology (Japan)
NPO 3D Associates (Japan)
Toshitaka Wakayama, Saitama Medical Univ. (Japan)

Published in SPIE Proceedings Vol. 10373:
Applied Optical Metrology II
Erik Novak; James D. Trolinger, Editor(s)

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