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Proceedings Paper

Development of concave-convex imaging mirror system for a compact and achromatic full-field x-ray microscope
Author(s): Jumpei Yamada; Satoshi Matsuyama; Shuhei Yasuda; Yasuhisa Sano; Yoshiki Kohmura; Makina Yabashi; Tetsuya Ishikawa; Kazuto Yamauchi
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Paper Abstract

A full-field X-ray microscope utilizing advanced Kirkpatrick–Baez optics, which comprises four concave mirrors, provides high-resolution X-ray images without chromatic aberration. However, a large distance is required between the mirrors and the detector to obtain sufficiently high magnification factor. To achieve reduce this distance, this paper proposes a novel X-ray imaging mirror system consisting of two pairs of concave and convex mirrors, which enables the effective focal length to be decreased by shifting the principal surface. For developing the proposed optics, the mirrors were fabricated with an ion beam figuring system and stitching interferometer, developed by our group, with a peak-to-valley accuracy of ~2 nm. Analysis results indicate that the fabricated mirrors can achieve nearly diffraction-limited imaging performance. We report the mirror fabrication results and the characteristics of the fabricated mirrors.

Paper Details

Date Published: 6 September 2017
PDF: 6 pages
Proc. SPIE 10386, Advances in X-Ray/EUV Optics and Components XII, 103860C (6 September 2017); doi: 10.1117/12.2272904
Show Author Affiliations
Jumpei Yamada, Osaka Univ. (Japan)
Satoshi Matsuyama, Osaka Univ. (Japan)
Shuhei Yasuda, Osaka Univ. (Japan)
Yasuhisa Sano, Osaka Univ. (Japan)
Yoshiki Kohmura, RIKEN SPring-8 Ctr. (Japan)
Makina Yabashi, RIKEN SPring-8 Ctr. (Japan)
Tetsuya Ishikawa, RIKEN SPring-8 Ctr. (Japan)
Kazuto Yamauchi, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 10386:
Advances in X-Ray/EUV Optics and Components XII
Christian Morawe; Ali M. Khounsary; Shunji Goto, Editor(s)

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