Share Email Print
cover

Proceedings Paper • new

Application of white-light phase-shifting in white-light scanning interferometry
Author(s): Yujing Wu; Chunkan Tao; Weiyi Wang; Yijun Zhang; Yunsheng Qian
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A method that combines scanning white-light interferometry with phase-shifting interferometry is proposed. The best-focus scanning position of correlograms is located by calculating the maximum modulation contrast, and the twice averaging four-frame algorithm is utilized to determine the phase difference between the best-focus position and the zero optical path difference point. The surface height is obtained according to the best-focus frame position and the unwrapped phase, which is achieved by a process of removing the phase ambiguity. Both simulated and experimental results demonstrate that the advanced method can achieve the advantages of high precision, large dynamic range, and be insensitive to the phase shifting deviation.

Paper Details

Date Published: 19 September 2017
PDF: 9 pages
Proc. SPIE 10396, Applications of Digital Image Processing XL, 1039628 (19 September 2017); doi: 10.1117/12.2272858
Show Author Affiliations
Yujing Wu, Nanjing Univ. of Science and Technology (China)
Chunkan Tao, Nanjing Univ. of Science and Technology (China)
Weiyi Wang, Nanjing Univ. of Science and Technology (China)
Yijun Zhang, Nanjing Univ. of Science and Technology (China)
Yunsheng Qian, Nanjing Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 10396:
Applications of Digital Image Processing XL
Andrew G. Tescher, Editor(s)

© SPIE. Terms of Use
Back to Top