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Proceedings Paper

All dielectric metasurface nano-fabrication based on TiO2 phase shifters
Author(s): Jeong Yub Lee; Jaekwan Kim; Kiyeon Yang; Yongsung Kim; Byonggwon Song; Jaeduck Jang; Soohwan Sul; Chang Seung Lee
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Paper Abstract

All dielectric metasurface of low loss TiO2 in visible wavelengths was devised forming subwavelength-scale nanostructures. DC-magnetron sputtering of oxygen-reduced TiOx (x<;2) target with reactive oxygen gas made dense amorphous TiO2 layers of 1.35nm Ra. A 380nm-thick TiO2 has low extinction coefficient (k) under 1x10-5, transparency of 98.33% and high refractive index (n) of 2.55 at 485nm wavelength. Highly precise TiO2 meta-atoms were successfully defined with 100nm-300nm feature size. Phase shift properties of TiO2 metasurface were measured. Finally, we constructed dielectric metaphotonic platform for various optical devices such as band pass filters, flat lens and beam deflectors in visible ranges.

Paper Details

Date Published: 31 August 2017
PDF: 8 pages
Proc. SPIE 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV, 103540I (31 August 2017); doi: 10.1117/12.2272148
Show Author Affiliations
Jeong Yub Lee, Samsung Electronics Co., Ltd. (Korea, Republic of)
Jaekwan Kim, Samsung Electronics Co., Ltd. (Korea, Republic of)
Kiyeon Yang, Samsung Electronics Co., Ltd. (Korea, Republic of)
Yongsung Kim, Samsung Electronics Co., Ltd. (Korea, Republic of)
Byonggwon Song, Samsung Electronics Co., Ltd. (Korea, Republic of)
Jaeduck Jang, Samsung Electronics Co., Ltd. (Korea, Republic of)
Soohwan Sul, Samsung Electronics Co., Ltd. (Korea, Republic of)
Chang Seung Lee, Samsung Electronics Co., Ltd. (Korea, Republic of)


Published in SPIE Proceedings Vol. 10354:
Nanoengineering: Fabrication, Properties, Optics, and Devices XIV
Eva M. Campo; Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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