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Proceedings Paper

Design and fabrication of micro silica sphere cavity force sensor based on hybrid Fabry Perot interferometer
Author(s): O. R. Ranjbar-Naeini; F. Jafari; P. Zarafshani; M. I. Zibaii; H. Latifi
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Paper Abstract

Measurement of small force in biological applications could be helpful especially in the field of diagnostic and prognostic procedure. For this purpose, a Hybrid Fabry Perot fiber optic Micro Cavity is proposed based on Micro Silica Sphere Cavity integrated on the capillary tube, and is bound to the single mode fiber with PDMS layer. Since PDMS acts as an elastic material, under small loads the cavity length was affected. To study this mechanical behavior, the sensor structure was simulated with Finite element method. The force measurement was studied experimentally with analyzing wavelength shifts of sensor. Consequently, the force sensitivity was equal to -3pm/mN. The force resolution of our sensor was equal to 340 μN in the range of 0 to 950 mN.

Paper Details

Date Published: 26 June 2017
PDF: 6 pages
Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032936 (26 June 2017); doi: 10.1117/12.2272013
Show Author Affiliations
O. R. Ranjbar-Naeini, Shahid Beheshti Univ. (Iran, Islamic Republic of)
F. Jafari, Shahid Beheshti Univ. (Iran, Islamic Republic of)
P. Zarafshani, Shahid Beheshti Univ. (Iran, Islamic Republic of)
M. I. Zibaii, Shahid Beheshti Univ. (Iran, Islamic Republic of)
H. Latifi, Shahid Beheshti Univ. (Iran, Islamic Republic of)


Published in SPIE Proceedings Vol. 10329:
Optical Measurement Systems for Industrial Inspection X
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves, Editor(s)

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