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Proceedings Paper

Spatial-temporal phase shifting interferometry: suppressing phase errors in dynamic Fizeau interferometer
Author(s): Wenhua Zhu; Lei Chen; Rihong Zhu; Rui Zhang; Donghui Zheng
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Paper Abstract

A spatial-temporal phase shifting interferometry is proposed to suppress the phase errors in dynamic Fizeau interferometer. The process of phase errors suppression in this interferometry includes three steps: (1) utilizing the spatial phase shifting interferometry to calculate the initial phase; (2) viewing all the effects of the error sources as a complex; (3) utilizing the temporal phase shifting interferometry to obtain multiple different initial phases and calculate the average phase. Experimentally, the phase errors are suppressed effectively and the measurement results are in good agreement with those obtained by Zygo GPI interferometer, which verifies that the proposed interferometry is a powerful tool for phase errors suppression in dynamic interferometer.

Paper Details

Date Published: 26 June 2017
PDF: 6 pages
Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032909 (26 June 2017); doi: 10.1117/12.2271189
Show Author Affiliations
Wenhua Zhu, Nanjing Univ. of Science and Technology (China)
Lei Chen, Nanjing Univ. of Science and Technology (China)
Rihong Zhu, Nanjing Univ. of Science and Technology (China)
Rui Zhang, Nanjing Univ. of Science and Technology (China)
Donghui Zheng, Nanjing Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 10329:
Optical Measurement Systems for Industrial Inspection X
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves, Editor(s)

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