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Proceedings Paper

High-numerical-aperture sphericity measurement based on stitching interferometry
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Paper Abstract

High precision optical components with large numerical aperture are widely used in industrial products. The stitching interferometry system was designed to measure high-numerical-aperture sphericity and extended the measurement range of interferometry. Firstly, sub-aperture stitching model and experimental system were analyzed. Adjustment mechanism with seven degrees of freedom was built to keep spherical surface in the null position. Then, optical path difference caused by adjustment errors was described by mathematical model. The misalignment aberrations in measurement result were removed after fitted by the Zernike polynomial and the accurate surface shape of single aperture is gained. Finally, a high-numerical-aperture sphericity was measured by the error homogenization algorithm. The PV and RMS are consistent with the results of full aperture testing.

Paper Details

Date Published: 13 June 2017
PDF: 7 pages
Proc. SPIE 10449, Fifth International Conference on Optical and Photonics Engineering, 104493A (13 June 2017); doi: 10.1117/12.2271175
Show Author Affiliations
Kebing Mou, Shanghai Univ. (China)
Xin Wu, Shanghai Univ. (China)
Yingjie Yu, Shanghai Univ. (China)


Published in SPIE Proceedings Vol. 10449:
Fifth International Conference on Optical and Photonics Engineering
Anand Krishna Asundi, Editor(s)

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