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Proceedings Paper

Photo-direct machining of polymers using laser plasma EUV sources
Author(s): Tetsuya Makimura; Hikari Urai; Daisuke Nakamura; Akihiko Takahashi; Hiroyuki Niino; Tatsuo Okada
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Proc. SPIE 10339, Pacific Rim Laser Damage 2017: Optical Materials for High-Power Lasers, 103390M; doi: 10.1117/12.2270893
Show Author Affiliations
Tetsuya Makimura, Univ. of Tsukuba (Japan)
Hikari Urai, Univ. of Tsukuba (Japan)
Daisuke Nakamura, Kyushu Univ. (Japan)
Akihiko Takahashi, Kyushu Univ. (Japan)
Hiroyuki Niino, National Institute of Advanced Industrial Science and Technology (Japan)
Tatsuo Okada, Kyushu Univ. (Japan)


Published in SPIE Proceedings Vol. 10339:
Pacific Rim Laser Damage 2017: Optical Materials for High-Power Lasers
Jianda Shao; Takahisa Jitsuno; Wolfgang Rudolph, Editor(s)

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