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Proceedings Paper

Single-shot multilayer measurement by chromatic confocal coherence tomography
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Paper Abstract

We propose Chromatic Confocal Coherence Tomography as a new system able to achieve corrected topography measurements of multi-layered specimens by measuring position, thickness and refractive index of each layer simultaneously at each measurement point. This feature is achieved by a combination of a chromatic confocal scheme and an interferometric one. The numerical aperture of the used microscope objective has a significant effect on the measurement uncertainty. Hence, its contribution to uncertainty is discussed in more detail.

Paper Details

Date Published: 26 June 2017
PDF: 7 pages
Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103290K (26 June 2017); doi: 10.1117/12.2270270
Show Author Affiliations
Tobias Boettcher, Univ. Stuttgart (Germany)
Marc Gronle, Univ. Stuttgart (Germany)
Wolfgang Osten, Univ. Stuttgart (Germany)


Published in SPIE Proceedings Vol. 10329:
Optical Measurement Systems for Industrial Inspection X
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves, Editor(s)

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