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Broadband interferometric characterisation of nano-positioning stages with sub-10 pm resolution
Author(s): Zhi Li; Uwe Brand; Helmut Wolff; Ludger Koenders; Andrew Yacoot; Prabowo Puranto
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Paper Abstract

A traceable calibration setup for investigation of the quasi-static and the dynamic performance of nano-positioning stages is detailed, which utilizes a differential plane-mirror interferometer with double-pass configuration from the National Physical Laboratory (NPL). An NPL-developed FPGA-based interferometric data acquisition and decoding system has been used to enable traceable quasi-static calibration of nano-positioning stages with high resolution. A lockin based modulation technique is further introduced to quantitatively calibrate the dynamic response of moving stages with a bandwidth up to 100 kHz and picometer resolution. First experimental results have proven that the calibration setup can achieve under nearly open-air conditions a noise floor lower than 10 pm/sqrt(Hz). A pico-positioning stage, that is used for nanoindentation with indentation depths down to a few picometers, has been characterized with this calibration setup.

Paper Details

Date Published: 26 June 2017
PDF: 9 pages
Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032944 (26 June 2017); doi: 10.1117/12.2270262
Show Author Affiliations
Zhi Li, Physikalisch-Technische Bundesanstalt (Germany)
Uwe Brand, Physikalisch-Technische Bundesanstalt (Germany)
Helmut Wolff, Physikalisch-Technische Bundesanstalt (Germany)
Ludger Koenders, Physikalisch-Technische Bundesanstalt (Germany)
Andrew Yacoot, National Physical Lab. (United Kingdom)
Prabowo Puranto, Physikalisch-Technische Bundesanstalt (Germany)


Published in SPIE Proceedings Vol. 10329:
Optical Measurement Systems for Industrial Inspection X
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves, Editor(s)

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