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Proceedings Paper

Surface profile measurement by using the integrated Linnik WLSI and confocal microscope system
Author(s): Wei-Chung Wang; Ming-Hsing Shen; Chi-Hung Hwang; Yun-Ting Yu; Tzu-Fong Wang
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Paper Abstract

The white-light scanning interferometer (WLSI) and confocal microscope (CM) are the two major optical inspection systems for measuring three-dimensional (3D) surface profile (SP) of micro specimens. Nevertheless, in practical applications, WLSI is more suitable for measuring smooth and low-slope surfaces. On the other hand, CM is more suitable for measuring uneven-reflective and low-reflective surfaces. As for aspect of surface profiles to be measured, the characteristics of WLSI and CM are also different. WLSI is generally used in semiconductor industry while CM is more popular in printed circuit board industry. In this paper, a self-assembled multi-function optical system was integrated to perform Linnik white-light scanning interferometer (Linnik WLSI) and CM. A connecting part composed of tubes, lenses and interferometer was used to conjunct finite and infinite optical systems for Linnik WLSI and CM in the self-assembled optical system. By adopting the flexibility of tubes and lenses, switching to perform two different optical measurements can be easily achieved. Furthermore, based on the shape from focus method with energy of Laplacian filter, the CM was developed to enhance the on focal information of each pixel so that the CM can provide all-in-focus image for performing the 3D SP measurement and analysis simultaneously. As for Linnik WLSI, eleven-step phase shifting algorithm was used to analyze vertical scanning signals and determine the 3D SP.

Paper Details

Date Published: 26 June 2017
PDF: 10 pages
Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103291A (26 June 2017); doi: 10.1117/12.2270195
Show Author Affiliations
Wei-Chung Wang, National Tsing Hua Univ. (Taiwan)
Ming-Hsing Shen, National Tsing Hua Univ. (Taiwan)
Chi-Hung Hwang, Instrument Technology Research Ctr. (Taiwan)
Yun-Ting Yu, National Tsing Hua Univ. (Taiwan)
Tzu-Fong Wang, National Tsing Hua Univ. (Taiwan)


Published in SPIE Proceedings Vol. 10329:
Optical Measurement Systems for Industrial Inspection X
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves, Editor(s)

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