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Revealing features of different optical shaping technologies by a point diffraction interferometer
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Paper Abstract

Almost hidden residual defects of a test surface can be revealed using high precision instrument such as a point diffraction interferometer (PDI). In general, PDI is engaged to display the figure of a surface or wavefront with subnanometer accuracy paying attention to low-frequency configurations. Such technique is suited to test EUV or X-ray optics. The tool described in the paper is able to map absolute profile deviations of several angstroms and therefore it provides a new vision of a surface under test of various quality, e.g. detects specific characteristics which immediately disclose either lapping or diamond turning has been used to form the substrate. Such inspection may help optimize the processes in early stage of shape forming before final configuring.

Paper Details

Date Published: 26 June 2017
PDF: 8 pages
Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103293X (26 June 2017); doi: 10.1117/12.2270116
Show Author Affiliations
Nikolay Voznesenskiy, Difrotec OÜ (Estonia)
Mariia Voznesenskaia, Difrotec OÜ (Estonia)
Diwaker Jha, Difrotec OÜ (Estonia)
Heidi Ottevaere, Vrije Univ. Brussel (Belgium)
Małgorzata Kujawińska, Warsaw Univ. of Technology (Poland)
Maciej Trusiak, Warsaw Univ. of Technology (Poland)
Kamil Liżewski, Warsaw Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 10329:
Optical Measurement Systems for Industrial Inspection X
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves, Editor(s)

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