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Proceedings Paper

Heterodyne grating interferometry based on sinusoidal phase modulation for displacement measurement
Author(s): Ju-Yi Lee; Hung-Lin Hsieh; Zhi Ying Lin
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Paper Abstract

In this study, a heterodyne grating interferometer based on the sinusoidal phase modulation method for displacement measurements was proposed. The interference beams were modulated using a sinusoidal oscillating grating, and the proposed frequency-domain quadrature detection method was used to detect the optical phase of the interferometer and determine the displacement. Experimental results were consistent with the strain gauge results for several displacement ranges. When only high-frequency noise was considered, our method achieved a measurement resolution of approximately 2 nm.

Paper Details

Date Published: 26 June 2017
PDF: 8 pages
Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103293S (26 June 2017); doi: 10.1117/12.2270100
Show Author Affiliations
Ju-Yi Lee, National Central Univ. (Taiwan)
Hung-Lin Hsieh, National Taiwan Univ. of Science and Technology (Taiwan)
Zhi Ying Lin, National Central Univ. (Taiwan)


Published in SPIE Proceedings Vol. 10329:
Optical Measurement Systems for Industrial Inspection X
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves, Editor(s)

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