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Proceedings Paper • Open Access

Experiment and application of soft x-ray grazing incidence optical scattering phenomena
Author(s): Shuyan Chen; Cheng Li; Yang Zhang; Liping Su; Tao Geng; Kun Li

Paper Abstract

For short wavelength imaging systems,surface scattering effects is one of important factors degrading imaging performance. Study of non-intuitive surface scatter effects resulting from practical optical fabrication tolerances is a necessary work for optical performance evaluation of high resolution short wavelength imaging systems. In this paper, Soft X-ray optical scattering distribution is measured by a soft X-ray reflectometer installed by my lab, for different sample mirrors、wavelength and grazing angle. Then aim at space solar telescope, combining these scattered light distributions, and surface scattering numerical model of grazing incidence imaging system, PSF and encircled energy of optical system of space solar telescope are computed. We can conclude that surface scattering severely degrade imaging performance of grazing incidence systems through analysis and computation.

Paper Details

Date Published: 16 August 2017
PDF: 6 pages
Proc. SPIE 10452, 14th Conference on Education and Training in Optics and Photonics: ETOP 2017, 104526G (16 August 2017); doi: 10.1117/12.2269945
Show Author Affiliations
Shuyan Chen, Harbin Engineering Univ. (China)
Cheng Li, Harbin Engineering Univ. (China)
Yang Zhang, Harbin Engineering Univ. (China)
Liping Su, Harbin Engineering Univ. (China)
Tao Geng, Harbin Engineering Univ. (China)
Kun Li, Harbin Engineering Univ. (China)


Published in SPIE Proceedings Vol. 10452:
14th Conference on Education and Training in Optics and Photonics: ETOP 2017
Xu Liu; Xi-Cheng Zhang, Editor(s)

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