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Measurement, certification and use of step-height calibration specimens in optical metrology
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Paper Abstract

Calibration, adjustment and verification of surface topography measuring instruments are important tasks, often facilitated by precision step-height specimens that have been calibrated using traceable metrology such as interferometry. Although standardized procedures for calculating parameters of the step-height are available for line profiling contact stylus systems, there is inconsistent guidance as to how to interpret step height data for 3D, areal surface topography instruments, such as confocal and interference microscopes. Here we provide definitions for the reference and measurement areas of step-height specimens as well as practical measurement protocols for processing the surface topography map.

Paper Details

Date Published: 26 June 2017
PDF: 9 pages
Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032919 (26 June 2017); doi: 10.1117/12.2269800
Show Author Affiliations
Peter de Groot, Zygo Corp. (United States)
Danette Fitzgerald, Zygo Corp. (United States)


Published in SPIE Proceedings Vol. 10329:
Optical Measurement Systems for Industrial Inspection X
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves, Editor(s)

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