Share Email Print
cover

Proceedings Paper

Highly sensitive two-channel laser acoustic sensor
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

In this work, we present two-channel system for detecting acoustic waves which is based on adaptive holographic interferometer using multi-wave mixing in photorefractive crystal. Micromechanical silicon cantilevers with dimensions of 233×45×4 μm3 mounted on metal membrane are used as sensitive elements. For the first cantilever the detection threshold of acoustic pressure of the sensor on frequency of 6.9 kHz is 17 mPa. For the second cantilever the detection threshold of acoustic pressure of the sensor on frequency of 8 kHz is 49 mPa.

Paper Details

Date Published: 14 December 2016
PDF: 5 pages
Proc. SPIE 10176, Asia-Pacific Conference on Fundamental Problems of Opto- and Microelectronics, 1017616 (14 December 2016); doi: 10.1117/12.2268125
Show Author Affiliations
Roman V. Romashko, Institute for Automation and Control Processes (Russian Federation)
Far-Eastern Federal Univ. (Russian Federation)
Timofey A. Efimov, Institute for Automation and Control Processes (Russian Federation)
Yury N. Kulchin, Institute for Automation and Control Processes (Russian Federation)
Far-Eastern Federal Univ. (Russian Federation)


Published in SPIE Proceedings Vol. 10176:
Asia-Pacific Conference on Fundamental Problems of Opto- and Microelectronics
Yuri N. Kulchin; Roman V. Romashko; Alexander V. Syuy, Editor(s)

© SPIE. Terms of Use
Back to Top