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Experimental research of the deterministic controlling process of surface figure in the large-aperture annular polishing
Author(s): Minghong Yang; Jianda Shao; Xueke Xu; Aihuan Dun; Lunzhe Wu; Yan Zhang; Jun Cao; Yang Zhang; Zhe Wang
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Paper Abstract

The response characteristics of the pitch polishing pad under the pressure of conditioner is the key factor which affect the control efficacy of surface figure in annular polishing. The effect of the environmental temperature and humidity, rotation speed of the pad, uploading ratio and eccentricity of the conditioner on the response characteristics of pitch polishing pad were experimental researched. To this aim, a control system of the environmental temperature and humidity on the 2.8m-aperture annular polishing machine is established. The control precision of the local environmental temperature upon the pad is up to ±0.1℃, and the control precision of humidity is up to ±1% RH. The experimental results indicate that the matching degree of the pad and the conditioner decides the changing rule of the surface figure of workpiece with the eccentricity of the conditioner. The new adjustable parameters including the environmental temperature and humidity and the uploading ratio of the conditioner were introduced to change the matching degree and improve the controllability of the of the surface figure. Under the optimized process, the long-term stability of the surface figure of the meter-scale optical element is realized using the 2.8m annular polishing machine, which is an important step for the final realization of the deterministic processing in the large-aperture annular polishing.

Paper Details

Date Published: 8 March 2017
PDF: 7 pages
Proc. SPIE 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 102551G (8 March 2017); doi: 10.1117/12.2268116
Show Author Affiliations
Minghong Yang, Shanghai Institute of Optics and Fine Mechanics (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)
Xueke Xu, Shanghai Hengyi Optical Precision Machinery Co., Ltd. (China)
Aihuan Dun, Shanghai Institute of Optics and Fine Mechanics (China)
Shanghai Hengyi Optical Precision Machinery Co., Ltd. (China)
Lunzhe Wu, Shanghai Institute of Optics and Fine Mechanics (China)
Shanghai Hengyi Optical Precision Machinery Co., Ltd. (China)
Yan Zhang, Shanghai Hengyi Optical Precision Machinery Co., Ltd. (China)
Jun Cao, Shanghai Institute of Optics and Fine Mechanics (China)
Shanghai Hengyi Optical Precision Machinery Co., Ltd. (China)
Yang Zhang, Shanghai Institute of Optics and Fine Mechanics (China)
Shanghai Hengyi Optical Precision Machinery Co., Ltd. (China)
Zhe Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Shanghai Hengyi Optical Precision Machinery Co., Ltd. (China)


Published in SPIE Proceedings Vol. 10255:
Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016
Yueguang Lv; Jialing Le; Hesheng Chen; Jianyu Wang; Jianda Shao, Editor(s)

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