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Topologically optimised flexure hinge based XY stage
Author(s): Adil Han Orta; Evren Samur; Cetin Yilmaz
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Paper Abstract

The purpose of this study is to develop a millimeter scale two degree of freedom planar actuation mechanism (XY stage) with flexure hinges that can generate micrometer scale motion at high frequencies. To amplify the micro scale motion in X and Y directions, two identical levers are used. According to the analytical and computational results, a prototype is developed for validation. Piezoelectric actuators are used in the system because of their compactness and large force capacity. The levers in the XY stage are topologically optimized so that the first resonance frequency of the system is maximized, which enlarges the operation range of the system.

Paper Details

Date Published: 30 May 2017
PDF: 9 pages
Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 1024607 (30 May 2017); doi: 10.1117/12.2267398
Show Author Affiliations
Adil Han Orta, Bogaziçi Univ. (Turkey)
Evren Samur, Bogaziçi Univ. (Turkey)
Cetin Yilmaz, Bogaziçi Univ. (Turkey)


Published in SPIE Proceedings Vol. 10246:
Smart Sensors, Actuators, and MEMS VIII
Luis Fonseca; Mika Prunnila; Erwin Peiner, Editor(s)

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