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Proceedings Paper

Optical thin film inspection using parallel spectral domain optical coherence tomography
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Paper Abstract

The conventional Fourier domain optical coherence tomography system requires single scanner for two dimensional cross-sectional image and two scanners for volumetric image. Parallel spectral domain optical coherence tomography has advantage of single scanner for volumetric image, while two dimensional cross-sectional images are obtained by parallel acquisition of illuminated line on sample using area camera. In this study, the industrial inspection of optical thin film on touch screen panels was demonstrated using parallel spectral domain optical coherence tomography. The cross-sectional and volumetric images were acquired to detect the internal sub layer defects in optical thin film which are difficult to observe using visual or machine vision based inspection methods. The results indicate the possible application of the proposed system in touch screen panels inspection for quality assurance of product at consumer end.

Paper Details

Date Published: 23 April 2017
PDF: 4 pages
Proc. SPIE 10323, 25th International Conference on Optical Fiber Sensors, 103238V (23 April 2017); doi: 10.1117/12.2267395
Show Author Affiliations
Muhammad Faizan Shirazi, Kyungpook National Univ. (Korea, Republic of)
Ruchire Eranga Wijesinghe, Kyungpook National Univ. (Korea, Republic of)
Naresh Kumar Ravichandran, Kyungpook National Univ. (Korea, Republic of)
Pilun Kim, Oz-tec Co., Ltd. (Korea, Republic of)
Mansik Jeon, Kyungpook National Univ. (Korea, Republic of)
Jeehyun Kim, Kyungpook National Univ. (Korea, Republic of)
Oz-tec Co., Ltd. (Korea, Republic of)


Published in SPIE Proceedings Vol. 10323:
25th International Conference on Optical Fiber Sensors
Youngjoo Chung; Wei Jin; Byoungho Lee; John Canning; Kentaro Nakamura; Libo Yuan, Editor(s)

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