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Optical and structural characterization of Nb, Zr, Nb/Zr, Zr/Nb thin films on Si3N4 membranes windows
Author(s): K. Jimenez; A. E. H. Gaballah; Nadeem Ahmed; P. Zuppella; P. Nicolosi
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Paper Abstract

High brilliance sources in the EUV spectral range such as Synchrotron and Free Electron Lasers (FEL) are widely used in multiple scientific and technological applications thanks to their peculiar characteristics. One main technical problem of FEL is related to the rejection of high harmonics, seed laser, first stage photons, and diffuse light; in order to improve the quality of the beam delivered by these sources, a suitable optical system acting as band-pass filters is necessary. In this paper we discuss the optical and structure characterization of Nb/Zr and Zr/Nb self-stand transmittance filters, designed for 4.5 nm-20 nm wavelength ranges. In order to understand the properties of these bilayers filters, a campaign of measurements has been planned to be performed on Zr and Nb films on Si3N4 membrane windows and silicon substrates, deposited with e- beam deposition technique. Comparison of the results has been planned too. IMD transmittance and reflectance simulations, together with preliminary AFM and reflectance measurements will be shown in this work.

Paper Details

Date Published: 15 May 2017
PDF: 10 pages
Proc. SPIE 10236, Damage to VUV, EUV, and X-ray Optics VI, 102360K (15 May 2017); doi: 10.1117/12.2267348
Show Author Affiliations
K. Jimenez, Univ. degli Studi di Padova (Italy)
CNR-IFN (Italy)
Univ. Autonoma de Santo Domingo (Dominican Republic)
A. E. H. Gaballah, Univ. degli Studi di Padova (Italy)
CNR-IFN (Italy)
National Institute for Standards (Egypt)
Nadeem Ahmed, Univ. degli Studi di Padova (Italy)
CNR-IFN (Italy)
P. Zuppella, CNR-IFN (Italy)
P. Nicolosi, Univ. degli Studi di Padova (Italy)
CNR-IFN (Italy)


Published in SPIE Proceedings Vol. 10236:
Damage to VUV, EUV, and X-ray Optics VI
Libor Juha; Saša Bajt; Regina Soufli, Editor(s)

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