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Proceedings Paper

X-ray diffraction optics of the submicron surface layers
Author(s): Igor M. Fodchuk; A. M. Raransky; Andrij V. Evdokimenko
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Paper Abstract

The scheme of x-ray diffraction on reflection for research of layers structure of single crystals after various kinds of external treatment is used. On a series of diffraction curves the profiles of distribution of deformations in thin subsurface areas of InSb and CdTe crystals irradiated by high-energy electrons and B ions are constructed. The given work demonstrates the opportunities of the skew asymmetric scheme of x-ray diffraction on reflection as in topographical, and in two crystal spectrometer scheme in research of structural changes in subsurface layers of various single crystal compounds after ion and electron irradiation.

Paper Details

Date Published: 10 November 1995
PDF: 5 pages
Proc. SPIE 2647, International Conference on Holography and Correlation Optics, (10 November 1995); doi: 10.1117/12.226722
Show Author Affiliations
Igor M. Fodchuk, Chernovtsy Univ. (Ukraine)
A. M. Raransky, Chernovtsy Univ. (Ukraine)
Andrij V. Evdokimenko, Chernovtsy Univ. (Ukraine)


Published in SPIE Proceedings Vol. 2647:
International Conference on Holography and Correlation Optics
Oleg V. Angelsky, Editor(s)

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