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Proceedings Paper

Holographic interferometric microscope optimized by conjugate reconstruction
Author(s): Oliver Kruschke; Guenther K.G. Wernicke
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Paper Abstract

A holographic interferometric microscope is presented, which performs a comfortable combination of the measurement accuracy of holographic interferometry and the imaging performance of a microscope objective. Conjugate reconstruction is used to separate the holographic recording setup and the microscopic observation arrangement. Furthermore an ideal optimized interferometer geometry can be achieved by conjugate reconstruction. Experimental results of investigations of microelectronic elements are demonstrated.

Paper Details

Date Published: 10 November 1995
PDF: 7 pages
Proc. SPIE 2647, International Conference on Holography and Correlation Optics, (10 November 1995); doi: 10.1117/12.226717
Show Author Affiliations
Oliver Kruschke, Humboldt Univ. Berlin (Germany)
Guenther K.G. Wernicke, Humboldt Univ. Berlin (Germany)

Published in SPIE Proceedings Vol. 2647:
International Conference on Holography and Correlation Optics
Oleg V. Angelsky, Editor(s)

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