Share Email Print
cover

Proceedings Paper • new

Tiny incident light angle sensor
Author(s): D. Mitrenga; M. Schädel; A. T. Winzer; S. Völlmeke; K. D. Preuß; J. Freitag; O. Brodersen
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A novel device for detecting the intensity and the angles of incoming light is presented. The silicon chip with 1 mm edge length comprises a segmented photo diode with four active areas within the inclined surfaces of a deep etched cavity. Simple signal difference analysis of these signals allow for accurate azimuth and inclination measurement in the range of 0 to 360° and 0 to 55°, respectively. Using an artificial neural network (ANN) calibration strategy the operation range of inclination can be increased up to 85° with typical angle errors below 2°. In this report we present details on design, fabrication, signal analysis and calibration strategies.

Paper Details

Date Published: 16 May 2017
PDF: 7 pages
Proc. SPIE 10231, Optical Sensors 2017, 102312C (16 May 2017); doi: 10.1117/12.2267135
Show Author Affiliations
D. Mitrenga, CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH (Germany)
M. Schädel, CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH (Germany)
A. T. Winzer, CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH (Germany)
S. Völlmeke, CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH (Germany)
K. D. Preuß, CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH (Germany)
J. Freitag, CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH (Germany)
O. Brodersen, CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH (Germany)


Published in SPIE Proceedings Vol. 10231:
Optical Sensors 2017
Francesco Baldini; Jiri Homola; Robert A. Lieberman, Editor(s)

© SPIE. Terms of Use
Back to Top