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Proceedings Paper

The planar silicon-based microelectronic technology for electrochemical transducers
Author(s): A. V. Novikov; A. E. Egorchikov; A. N. Dolgov; E. S. Gornev; V. G. Popov; I. V. Egorov; V. G. Krishtop
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Paper Abstract

We have developed the new technology for production of sensitive modules for electrochemical sensors of pressure and acceleration. The technology is applicable for mass production and scalable for high-volume production. In this work we demonstrate the new sensing module for electrochemical motion sensors, and its possibility of applying in geophones. We fabricated prototypes of electrochemical planar transducer chips, produced a laboratory prototype of a geophone based on our planar transducer chip, and tested them. This paper presents the preliminary results of the tests.

Paper Details

Date Published: 30 December 2016
PDF: 6 pages
Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241J (30 December 2016); doi: 10.1117/12.2267095
Show Author Affiliations
A. V. Novikov, Mikron JSC (Russian Federation)
A. E. Egorchikov, Mikron JSC (Russian Federation)
A. N. Dolgov, Mikron JSC (Russian Federation)
E. S. Gornev, JCS Molecular Electronics Research Institute (Russian Federation)
V. G. Popov, Institute of Microelectronics Technology and High Purity Materials (Russian Federation)
Moscow Institute of Physics and Technology (State Univ.) (Russian Federation)
I. V. Egorov, Moscow Institute of Physics and Technology (State Univ.) (Russian Federation)
Seismotronics LLC (Russian Federation)
V. G. Krishtop, Institute of Microelectronics Technology and High Purity Materials (Russian Federation)
Seismotronics LLC (Russian Federation)


Published in SPIE Proceedings Vol. 10224:
International Conference on Micro- and Nano-Electronics 2016
Vladimir F. Lukichev; Konstantin V. Rudenko, Editor(s)

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