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Proceedings Paper

The simulation model of planar electrochemical transducer
Author(s): D. A. Zhevnenko; S. S. Vergeles; T. V. Krishtop; D. V. Tereshonok; E. S. Gornev; V. G. Krishtop
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Paper Abstract

Planar electrochemical systems are very perspective to build modern motion and pressure sensors. Planar microelectronic technology is successfully used for electrochemical transducer of motion parameters. These systems are characterized by an exceptionally high sensitivity towards mechanic exposure due to high rate of conversion of the mechanic signal to electric current. In this work, we have developed a mathematical model of this planar electrochemical system, which detects the mechanical signals. We simulate the processes of mass and charge transfer in planar electrochemical transducer and calculated its transfer function with different geometrical parameters of the system.

Paper Details

Date Published: 30 December 2016
PDF: 10 pages
Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241I (30 December 2016); doi: 10.1117/12.2267082
Show Author Affiliations
D. A. Zhevnenko, Institute of Microelectronics Technology and High Purity Materials (Russian Federation)
Seismotronics LLC (Russian Federation)
S. S. Vergeles, Moscow Institute of Physics and Technology (State Univ.) (Russian Federation)
Landau Institute for Theoretical Physics (Russian Federation)
T. V. Krishtop, Kotel'nikov Institute of Radio-Engineering and Electronics (Russian Federation)
D. V. Tereshonok, Moscow Institute of Physics and Technology (State Univ.) (Russian Federation)
Joint Institute for High Temperatures (Russian Federation)
E. S. Gornev, Moscow Institute of Physics and Technology (State Univ.) (Russian Federation)
JCS Molecular Electronics Research Institute (Russian Federation)
V. G. Krishtop, Institute of Microelectronics Technology and High Purity Materials (Russian Federation)
Seismotronics LLC (Russian Federation)


Published in SPIE Proceedings Vol. 10224:
International Conference on Micro- and Nano-Electronics 2016
Vladimir F. Lukichev; Konstantin V. Rudenko, Editor(s)

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