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Proceedings Paper

Integral planar supercapacitor with CNT-based composite electrodes for heat-sensitive MEMS and NEMS
Author(s): E. Lebedev; A. Alekseyev; I. Gavrilin; A. Sysa; E. Kitsyuk; R. Ryazanov; D. Gromov
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Paper Abstract

A method based on electrophoretic deposition (EPD) has been developed to produce uniform and local deposits of multiwalled carbon nanotubes (CNT) on interdigital structures of planar supercapacitor (SC) at room temperatures. Alcohol/acetone suspensions were used under constant voltage conditions in the range of 6 to 100 V, with deposition times ranging from 2 to 60 minutes and electrodes space from 2 to 15 mm. It was shown that for dense layers deposition with good adhesion on the narrow lines of the planar SC electrodes it is necessary to use average values of the electric field and multi-stage method in which the deposition and drying processes are alternated. Electrochemical tests of the sandwich-like supercapacitors with electrodes obtained by the described method were carried out. The specific capacity of experimental samples increased from 0.24 to 1.07 mF/cm2 with an increase in the number of EPD cycles from 3 to 9.

Paper Details

Date Published: 30 December 2016
PDF: 7 pages
Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241F (30 December 2016); doi: 10.1117/12.2267079
Show Author Affiliations
E. Lebedev, National Research Univ. of Electronic Technology (Russian Federation)
A. Alekseyev, National Research Univ. of Electronic Technology (Russian Federation)
I. Gavrilin, National Research Univ. of Electronic Technology (Russian Federation)
A. Sysa, National Research Univ. of Electronic Technology (Russian Federation)
E. Kitsyuk, SRC SMC Technological Ctr. MSIEE (Russian Federation)
R. Ryazanov, SRC SMC Technological Ctr. MSIEE (Russian Federation)
D. Gromov, National Research Univ. of Electronic Technology (Russian Federation)


Published in SPIE Proceedings Vol. 10224:
International Conference on Micro- and Nano-Electronics 2016
Vladimir F. Lukichev; Konstantin V. Rudenko, Editor(s)

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