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Proceedings Paper

Optical emission 2D-tomography of plasma: case of rectangular two-view scanning and diagonal symmetry of inhomogeneities
Author(s): A. V. Fadeev; K. V. Rudenko
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Paper Abstract

The case of the diagonal symmetry of plasma inhomogeneities scanned at two-view emission tomography was investigated. Original method for 2D-tomographic reconstruction utilizing analytical description of local inhomogeneities of the spatial distribution of the density of neutral and charged plasma particles on the chamber cross section was improved.

Paper Details

Date Published: 30 December 2016
PDF: 8 pages
Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102242D (30 December 2016); doi: 10.1117/12.2266838
Show Author Affiliations
A. V. Fadeev, Institute of Physics and Technology (Russian Federation)
K. V. Rudenko, Institute of Physics and Technology (Russian Federation)


Published in SPIE Proceedings Vol. 10224:
International Conference on Micro- and Nano-Electronics 2016
Vladimir F. Lukichev; Konstantin V. Rudenko, Editor(s)

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