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Proceedings Paper

3D simulation of silicon micro-ring resonator with Comsol
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Paper Abstract

In this paper we provide 3d full-vector static electromagnetic simulation of silicon micro-ring resonator operating. We show that geometrical and scalar approaches are not sufficiently accurate for calculating resonator parameters. Quite strong dependence of ring resonator radius on waveguide width is revealed.

Paper Details

Date Published: 30 December 2016
PDF: 5 pages
Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241L (30 December 2016); doi: 10.1117/12.2266783
Show Author Affiliations
S. A. Degtyarev, Samara National Research Univ. (Russian Federation)
Image Processing Systems Institute (Russian Federation)
V. V. Podlipnov, Samara National Research Univ. (Russian Federation)
Image Processing Systems Institute (Russian Federation)
Payal Verma, Samara National Research Univ. (Russian Federation)
S. N. Khonina, Samara National Research Univ. (Russian Federation)
Image Processing Systems Institute (Russian Federation)


Published in SPIE Proceedings Vol. 10224:
International Conference on Micro- and Nano-Electronics 2016
Vladimir F. Lukichev; Konstantin V. Rudenko, Editor(s)

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