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Proceedings Paper

Simulation of heavy charged particles damage on MEMS
Author(s): V. Shakhnov; A. Glushko; V. Makarchuk; L. Zinchenko; V. Terekhov; S. Mikhaylichenko
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Paper Abstract

The paper presents computer simulation results of heavy charged particles radiation effect on elements of electrostatic microelectromechanical systems. Modeling methods of heavy charged particles impact on MEMS elements were envisaged. The radiation sensitivity of different types of fractal electrostatic MEMS were evaluated. Methods of reduction of radiation impact on electrostatic MEMS based on fractal theory were discussed. Conclusions about fractal electrostatic MEMS features were outlined.

Paper Details

Date Published: 30 December 2016
PDF: 8 pages
Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241C (30 December 2016); doi: 10.1117/12.2266750
Show Author Affiliations
V. Shakhnov, Bauman Moscow State Technical Univ. (Russian Federation)
A. Glushko, Bauman Moscow State Technical Univ. (Russian Federation)
V. Makarchuk, Bauman Moscow State Technical Univ. (Russian Federation)
L. Zinchenko, Bauman Moscow State Technical Univ. (Russian Federation)
V. Terekhov, Bauman Moscow State Technical Univ. (Russian Federation)
S. Mikhaylichenko, Bauman Moscow State Technical Univ. (Russian Federation)


Published in SPIE Proceedings Vol. 10224:
International Conference on Micro- and Nano-Electronics 2016
Vladimir F. Lukichev; Konstantin V. Rudenko, Editor(s)

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