Share Email Print
cover

Proceedings Paper

Three-dimensional measurement based on a Greenough-type stereomicroscope using phase-shifting projection
Author(s): Yan Hu; Qian Chen; Yuzhen Zhang; Tianyang Tao; Hui Li; Chao Zuo
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We propose an absolute 3D micro surface profile measurement technique based on a Greenough-type stereomicroscope. The camera and the projector are fixed on the stereomicroscope, facilitating a flexible 3D measurement of objects with different heights. Experiments of both calibration and measurements are conducted, and the results show that our proposed method works well for measuring different types of geometry like spheres, ramps and planes etc. The reconstruction accuracy can achieve 4.8 μm with a measurement depth about 3 mm.

Paper Details

Date Published: 10 February 2017
PDF: 5 pages
Proc. SPIE 10250, International Conference on Optical and Photonics Engineering (icOPEN 2016), 102501J (10 February 2017); doi: 10.1117/12.2266712
Show Author Affiliations
Yan Hu, Nanjing Univ. of Science and Technology (China)
Qian Chen, Nanjing Univ. of Science and Technology (China)
Yuzhen Zhang, Nanjing Univ. of Science and Technology (China)
Tianyang Tao, Nanjing Univ. of Science and Technology (China)
Hui Li, Nanjing Univ. of Science and Technology (China)
Chao Zuo, Nanjing Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 10250:
International Conference on Optical and Photonics Engineering (icOPEN 2016)
Anand Krishna Asundi; Xiyan Huang; Yi Xie, Editor(s)

© SPIE. Terms of Use
Back to Top