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Proceedings Paper

Investigation of the chemical composition and atomic emission spectroscopy of fused silica in CF4 plasma processing
Author(s): Huiliang Jin; Caixue Tang; Nan Zheng; Wenhui Deng; Xianhua Chen
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Paper Abstract

The surface chemical composition and atomic emission spectroscopy of F atoms and CF2 molecules involved in the processing of Atmospheric Pressure Plasma Jet (APPJ) produced from CF4 precursor has been explored. The XPS spectra illustrated that small amount of radicals including C-CFn and CF-CFn could be introduced onto the fused silica surface during the CF4 plasma process, the fluorocarbon radicals were generated during CF4 plasma ionization. Moreover, the relative concentrations of excited state species of F atoms and CF2 molecules, which play significant role in remove and fluorocarbon radicals, were acquired for CF4 plasma. The densities of F atoms increased dramatically with increasing applied RF power, whereas CF2 molecules decreased monotonically over the same power range, the subsequent electron impacted decomposition of plasma species after CF4 precursor fragmentation. The spectrum of the F atoms and CF2 molecules fallowed the same tendency with the increasing concentration of gas CF4, reaching the maximum at the 20sccm and 15sccm respectively, and then the emission intensity of reactive atoms decreased with more CF4 molecules participating. Addition certain amount O2 into CF4 plasma resulted in promoting CF4 dissociation, O2 can easily react with the dissociation product of CF2 molecules, which inhibit the compound of the F atoms, so with the increasing concentration of O2, the concentration of the CF2 molecules decreased and the emission intensities of F atoms showed the maximum at the O2/CF4 ratio of 20%. These results have led to the development of a scheme that illustrates the mechanisms of surface chemistry reaction and the affection of plasma parameters in CF4 plasma systems with respect to F and CF2 gas-phase species.

Paper Details

Date Published: 8 March 2017
PDF: 6 pages
Proc. SPIE 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 1025515 (8 March 2017); doi: 10.1117/12.2266534
Show Author Affiliations
Huiliang Jin, Chengdu Fine Optical Engineering Research Ctr. (China)
Caixue Tang, Chengdu Fine Optical Engineering Research Ctr. (China)
Nan Zheng, Chengdu Fine Optical Engineering Research Ctr. (China)
Wenhui Deng, Chengdu Fine Optical Engineering Research Ctr. (China)
Xianhua Chen, Chengdu Fine Optical Engineering Research Ctr. (China)


Published in SPIE Proceedings Vol. 10255:
Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016
Yueguang Lv; Jialing Le; Hesheng Chen; Jianyu Wang; Jianda Shao, Editor(s)

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